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EMMI, sometimes called PEM - Photon Emission Microscopy, is most commonly used method in semiconductor fault isolation. EMMI inspection will use CCD camera to detect any light/photon emitted from the biased the device. It is excellent tools to locate leakage current point. However, with the development of low/ultra-low power device with increasing complexity of the semiconductor device, EMMI is less likely of locating the failure point.

Strengths Limitations

- Relative easy to operate
- Can be detect junction failure

- Photon signal been block by metallization
- Not able to detect metal short
- EMMI spot size is relative large