TEM (Transmission Electron Microscope)

  • Transmission Electron Microscope (TEM) is a high resolution analysis technique that allows one to see detail on an atomic scale.
  • Samples are generally prepared until they are thin enough for electrons to penetrate through it to the detector.
  • Coupled with EDX or EELS, quantitative information can be obtained.
  • Another application of TEM is to make metrology measurements of crystalline, amorphous, etc., layers.

Strengths Limitations

- High spatial resolution in nm
- Morphology information
- Quantitative analysis using EDX attachment

- Most samples need to be specially prepared for analysis
- Time consuming


TEM image showing transistor gate Oxide thickness


Transistor cross-section structure


Copper dual damascence metallization process


More information: http://en.wikipedia.org/wiki/Transmission_electron_microscopy