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TEM (Transmission Electron Microscope)

  • Transmission Electron Microscope (TEM) is a high resolution analysis technique that allows one to see detail on an atomic scale.
  • Samples are generally prepared until they are thin enough for electrons to penetrate through it to the detector.
  • Coupled with EDX or EELS, quantitative information can be obtained.
  • Another application of TEM is to make metrology measurements of crystalline, amorphous, layers, etc.

Strengths Limitations

- High spatial resolution in nm
- Morphology information
- Quantitative analysis using EDX attachment

- Most samples need to be specially prepared for analysis
- Time consuming

TEM image showing transistor gate Oxide thickness

Transistor cross-section structure

Copper dual damascence metallization process

More information: http://en.wikipedia.org/wiki/Transmission_electron_microscopy