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Chemical: ICP-MS, GC-MS, GPC
Tool Name Specifications Applications

GPC
(Gel Permeation Chromatography)

- THF column
- Molecular weight from 1000 to 10 million
- Column temperature 40 °C
- Inject value 20 ul

- Measure molecular weight of polymer
- Measure PDI of polymer

GC-MS
(Gas Chromatography Mass Spectrometry)

- Inert ion source- programmable up to 350°C
- Up to 200C (Analyzer)
- Signal-to-noise specification (1 pg OFN, 400:1)
- Mass Range up to 1050u
- Mass Analyzer Triple Quadrupole
- Ionization Method(s)EI, PCI, NCI
- Full mass library available
- Mass axis stability Better than 0.10 u/48 h

- Measurement of VOCs
- Determination of compounds

ICP-MS
(Inductively Coupled Plasma Mass Spectrometry)

- Quadrupole Ion Deflector
- Liquid sample extraction
- VPD wafer surface scan option available
- Resolution 0.7 amu

- Measurement of traceable elements