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Ellipsometry
Specifications Applications

- THF column
- Molecular weight from 1000 to 10 million
- Column temperature 40°C
- Inject value 20 ul
- Spectral range from 193nm to 1000nm
- Resolution +/-0.6nm
- Film thickness range 1nm-250um
- Analysis spot size 2mm
- Angle of incidence: ~ 75°
- Max sample size: 150mm dia.
- Max sample thickness: 20mm

- Measure molecular weight of polymer
- Measure PDI of polymer
- Measure film thickness for ITO, amorphous and nanocrystalline silicon, oxide and nitride thin films, photoresist and thin metal layer.
- Measure refract index of film