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TXRF (Total Reflection X-ray Spectroscopy)

  • Total Reflection X-ray Spectroscopy (TXRF) is a near surface (<5nm) instrument capable of quantifying many elements with excellent detection limits (108 ~ 109 / cm2).
  • It can analyzing large flat samples, including 300mm wafers.

Strengths Limitations

- Quantification with sensitivity factors
- Excellent detection limits (108 ~ 109 / cm2)
- Capable of analyzing 200-300mm wafers
- Quantifying small defects and residues

- Cannot detect elements below Na mass
- Need clean room environment
- Requires flat surface
- Large analysis area